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Stacking fault formation via 2D nucleation in PVT grown 4H-SiC

  • Fang Zhen Wu
  • , Huan Huan Wang
  • , Yu Yang
  • , Jian Qiu Guo
  • , Balaji Raghothamachar
  • , Michael Dudley
  • , Stephan G. Mueller
  • , Gil Chung
  • , Edward K. Sanchez
  • , Darren Hansen
  • , Mark J. Loboda
  • , Li Hua Zhang
  • , Dong Su
  • , Kim Kisslinger
  • , Eric Stach
  • Stony Brook University
  • Dow Chemical
  • Brookhaven National Laboratory

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

Synchrotron white beam x-ray topography (SWBXT), synchrotron monochromatic beam x-ray topography (SMBXT), and high resolution transmission electron microscopy (HRTEM) studies have been carried out on stacking faults in PVT grown 4H-SiC crystal. Their fault vectors were determined by SWBXT to be 1/3<-1100>, 1/2<0001>, 1/6<-2203>, 1/12<4-403>, 1/12<- 4403>. HRTEM studies reveal their similarity in stacking sequences as limited numbers of bilayers of 6H polytype structure. Simulation results of the two partial dislocations associated with the stacking faults in SMBXT images reveal the opposite sign nature of their Burgers vectors. A mechanism for stacking fault formation via 2D nucleation is postulated.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2014
EditorsDidier Chaussende, Gabriel Ferro
PublisherTrans Tech Publications Ltd
Pages85-89
Number of pages5
ISBN (Print)9783038354789
DOIs
StatePublished - 2015
EventEuropean Conference on Silicon Carbide and Related Materials, ECSCRM 2014 - Grenoble, France
Duration: Sep 21 2014Sep 25 2014

Publication series

NameMaterials Science Forum
Volume821-823

Conference

ConferenceEuropean Conference on Silicon Carbide and Related Materials, ECSCRM 2014
Country/TerritoryFrance
CityGrenoble
Period09/21/1409/25/14

Keywords

  • HRTEM
  • Macrostep
  • Polytype
  • Stacking faults
  • X-ray topography

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