Surface topography evolution and fatigue fracture in polysilicon MEMS structures

Seyed M. Allameh; Pranav Shrotriya; Alex Butterwick; Stuart B. Brown; Wole O. Soboyejo

doi:10.1109/JMEMS.2003.809957

Surface topography evolution and fatigue fracture in polysilicon MEMS structures

Seyed M. Allameh
, Pranav Shrotriya
, Alex Butterwick
, Stuart B. Brown
, Wole O. Soboyejo

President

SUNY Polytechnic Institute

Research output: Contribution to journal › Article › peer-review

68 Scopus citations

Abstract

This paper presents the results of an experimental study of the micromechanisms of surface topography evolution and fatigue fracture in polysilicon MEMS structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO₂ layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are characterized as functions of fatigue cycling before discussing the micromechanisms of fatigue fracture.

Original language	English
Pages (from-to)	313-324
Number of pages	12
Journal	Journal of Microelectromechanical Systems
Volume	12
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2003.809957
State	Published - Jun 2003

Keywords

Evolution
Fatigue
Fracture
Microelectromechanical systems (MEMS)
Polysilicon SiO layers
Surface topography

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10.1109/JMEMS.2003.809957

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title = "Surface topography evolution and fatigue fracture in polysilicon MEMS structures",

abstract = "This paper presents the results of an experimental study of the micromechanisms of surface topography evolution and fatigue fracture in polysilicon MEMS structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are characterized as functions of fatigue cycling before discussing the micromechanisms of fatigue fracture.",

keywords = "Evolution, Fatigue, Fracture, Microelectromechanical systems (MEMS), Polysilicon SiO layers, Surface topography",

author = "Allameh, \{Seyed M.\} and Pranav Shrotriya and Alex Butterwick and Brown, \{Stuart B.\} and Soboyejo, \{Wole O.\}",

year = "2003",

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doi = "10.1109/JMEMS.2003.809957",

language = "English",

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T1 - Surface topography evolution and fatigue fracture in polysilicon MEMS structures

AU - Allameh, Seyed M.

AU - Shrotriya, Pranav

AU - Butterwick, Alex

AU - Brown, Stuart B.

AU - Soboyejo, Wole O.

PY - 2003/6

Y1 - 2003/6

N2 - This paper presents the results of an experimental study of the micromechanisms of surface topography evolution and fatigue fracture in polysilicon MEMS structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are characterized as functions of fatigue cycling before discussing the micromechanisms of fatigue fracture.

AB - This paper presents the results of an experimental study of the micromechanisms of surface topography evolution and fatigue fracture in polysilicon MEMS structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are characterized as functions of fatigue cycling before discussing the micromechanisms of fatigue fracture.

KW - Evolution

KW - Fatigue

KW - Fracture

KW - Microelectromechanical systems (MEMS)

KW - Polysilicon SiO layers

KW - Surface topography

UR - https://www.scopus.com/pages/publications/0038209281

U2 - 10.1109/JMEMS.2003.809957

DO - 10.1109/JMEMS.2003.809957

M3 - Article

SN - 1057-7157

VL - 12

SP - 313

EP - 324

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 3

ER -

Surface topography evolution and fatigue fracture in polysilicon MEMS structures

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Keywords

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