Synchrotron white beam topography studies of screw dislocations in 6H-SiC single crystals

S. Wang; M. Dudley; C. H. Carter; V. F. Tsvetkov; C. Fazi

Synchrotron white beam topography studies of screw dislocations in 6H-SiC single crystals

S. Wang
, M. Dudley
, C. H. Carter
, V. F. Tsvetkov
, C. Fazi

Materials Science and Engineering

Stony Brook University

Stony Brook University

Research output: Contribution to journal › Conference article › peer-review

9 Scopus citations

Abstract

Synchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as 'micropipes', were studied extensively. Detailed analysis of topographic image contrast associated with 'micropipes', based on the kinematical theory of X-ray diffraction, established that the so-called 'micropipes' are screw dislocations with large Burgers vectors.

Original language	English
Pages (from-to)	281-286
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	375
State	Published - 1995
Event	Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: Nov 28 1994 → Dec 1 1994

Cite this

@article{85ca81ed5d3c40099dcd5481609db0b3,

title = "Synchrotron white beam topography studies of screw dislocations in 6H-SiC single crystals",

abstract = "Synchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as 'micropipes', were studied extensively. Detailed analysis of topographic image contrast associated with 'micropipes', based on the kinematical theory of X-ray diffraction, established that the so-called 'micropipes' are screw dislocations with large Burgers vectors.",

author = "S. Wang and M. Dudley and Carter, \{C. H.\} and Tsvetkov, \{V. F.\} and C. Fazi",

year = "1995",

language = "English",

volume = "375",

pages = "281--286",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Proceedings of the 1994 MRS Fall Meeting ; Conference date: 28-11-1994 Through 01-12-1994",

}

TY - JOUR

T1 - Synchrotron white beam topography studies of screw dislocations in 6H-SiC single crystals

AU - Wang, S.

AU - Dudley, M.

AU - Carter, C. H.

AU - Tsvetkov, V. F.

AU - Fazi, C.

PY - 1995

Y1 - 1995

N2 - Synchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as 'micropipes', were studied extensively. Detailed analysis of topographic image contrast associated with 'micropipes', based on the kinematical theory of X-ray diffraction, established that the so-called 'micropipes' are screw dislocations with large Burgers vectors.

AB - Synchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as 'micropipes', were studied extensively. Detailed analysis of topographic image contrast associated with 'micropipes', based on the kinematical theory of X-ray diffraction, established that the so-called 'micropipes' are screw dislocations with large Burgers vectors.

UR - https://www.scopus.com/pages/publications/0029209663

M3 - Conference article

SN - 0272-9172

VL - 375

SP - 281

EP - 286

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1994 MRS Fall Meeting

Y2 - 28 November 1994 through 1 December 1994

ER -

Synchrotron white beam topography studies of screw dislocations in 6H-SiC single crystals

Abstract

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