@inproceedings{acfe5508ea0c4e69b6adc841ae566a6d,
title = "Synthesis and characterization of Ni/Si nanowires for electrical transport",
abstract = "Self-assembled Si nanowires (SiNWs) have been synthesized and characterized as a template for surface metal silicide formation to investigate confinement of electron transport at the nanowire surface. The SiNWs with diameters ranging from 5 to 180 nm were synthesized via the solid-liquid-solid (SLS) mechanism with a sputtered Au film as catalyst. Post-deposition thermal processing was carried out for suicide formation. Metal-silicide coated wires were dispensed on metal-patterned Si wafers to carry out two-point and four-point electrical conductivity measurements. Electrical contacts were formed via FIB-based Pt deposition. Metal-silicide-coated SiNWs exhibited an improvement in electrical conductivity of several orders of magnitude. Preliminary analyses imply variable thickness of the metal suicide region based, in part, on deposition methodology and thermal process parameters.",
keywords = "Electrical conductivity, Nickel silicide, Silicon nanowire (SiNW), Solid-liquid-solid (SLS)",
author = "Lee, \{Jae Ho\} and Michael Carpenter and Eric Eisenbraun and Yongqiang Xue and Robert Geer",
year = "2008",
language = "English",
isbn = "9781420085075",
series = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
pages = "153--156",
booktitle = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
note = "2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 ; Conference date: 01-06-2008 Through 05-06-2008",
}