Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron‐beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)

Ivan Gitsov; Nikolina A. Madjarova

doi:10.1002/app.1990.070411117

Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron‐beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)

Ivan Gitsov
, Nikolina A. Madjarova

Chemistry

College of Environmental Science & Forestry

Institute for Microelectronics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Terpolymers of methyl methacrylate with methacrylic acid and methacryloyl chloride [poly(MMA‐MAA‐MAC)] were synthesized with high yields by slow radical polymerization. The influence of the temperature of prebaking on the changes in the chemical composition and the molecular weight characteristics of poly(MMA‐5%MAA‐5%MAC) was studied by infrared spectroscopy and gel permeation chromatography. It was found that resists containing terpolymer with molecular weight (M̄_w) of 41,000, which were prebaked at 100°C, were able to produce high contrast images (γ = 3.3) at doses of 16 μC/cm².

Original language	English
Pages (from-to)	2705-2710
Number of pages	6
Journal	Journal of Applied Polymer Science
Volume	41
Issue number	11-12
DOIs	https://doi.org/10.1002/app.1990.070411117
State	Published - 1990

Access to Document

10.1002/app.1990.070411117

Cite this

@article{fdab918c3f88481a9b9c0ffd6c307e46,

title = "Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron‐beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)",

abstract = "Terpolymers of methyl methacrylate with methacrylic acid and methacryloyl chloride [poly(MMA‐MAA‐MAC)] were synthesized with high yields by slow radical polymerization. The influence of the temperature of prebaking on the changes in the chemical composition and the molecular weight characteristics of poly(MMA‐5\%MAA‐5\%MAC) was studied by infrared spectroscopy and gel permeation chromatography. It was found that resists containing terpolymer with molecular weight ({\=M}w) of 41,000, which were prebaked at 100°C, were able to produce high contrast images (γ = 3.3) at doses of 16 μC/cm2.",

author = "Ivan Gitsov and Madjarova, \{Nikolina A.\}",

year = "1990",

doi = "10.1002/app.1990.070411117",

language = "English",

volume = "41",

pages = "2705--2710",

journal = "Journal of Applied Polymer Science",

issn = "0021-8995",

publisher = "John Wiley \& Sons Inc.",

number = "11-12",

}

TY - JOUR

T1 - Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron‐beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)

AU - Gitsov, Ivan

AU - Madjarova, Nikolina A.

PY - 1990

Y1 - 1990

N2 - Terpolymers of methyl methacrylate with methacrylic acid and methacryloyl chloride [poly(MMA‐MAA‐MAC)] were synthesized with high yields by slow radical polymerization. The influence of the temperature of prebaking on the changes in the chemical composition and the molecular weight characteristics of poly(MMA‐5%MAA‐5%MAC) was studied by infrared spectroscopy and gel permeation chromatography. It was found that resists containing terpolymer with molecular weight (M̄w) of 41,000, which were prebaked at 100°C, were able to produce high contrast images (γ = 3.3) at doses of 16 μC/cm2.

AB - Terpolymers of methyl methacrylate with methacrylic acid and methacryloyl chloride [poly(MMA‐MAA‐MAC)] were synthesized with high yields by slow radical polymerization. The influence of the temperature of prebaking on the changes in the chemical composition and the molecular weight characteristics of poly(MMA‐5%MAA‐5%MAC) was studied by infrared spectroscopy and gel permeation chromatography. It was found that resists containing terpolymer with molecular weight (M̄w) of 41,000, which were prebaked at 100°C, were able to produce high contrast images (γ = 3.3) at doses of 16 μC/cm2.

UR - https://www.scopus.com/pages/publications/0025632250

U2 - 10.1002/app.1990.070411117

DO - 10.1002/app.1990.070411117

M3 - Article

SN - 0021-8995

VL - 41

SP - 2705

EP - 2710

JO - Journal of Applied Polymer Science

JF - Journal of Applied Polymer Science

IS - 11-12

ER -

Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron‐beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)

Abstract

Access to Document

Other files and links

Fingerprint

Cite this