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System Integration of IC chips for Lab-on-CMOS Applications

  • Sheung Lu
  • , Bathiya Senevirathna
  • , Marc Dandin
  • , Elisabeth Smela
  • , Pamela Abshire
  • University of Maryland, College Park
  • Kiskeya Microsystems

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

Integrating CMOS sensor chips to allow for wet experimentation on lab-on-CMOS devices is a challenging task. In this paper we describe a chip packaging method that will allow for simple integration and handling of small integrated circuit (IC) chips. A chip is embedded in an epoxy handle wafer to allow for photolithographic processing. Electrical connections are provided by a sputter-deposited copper layer and an electroplated nickel layer. Passivation was performed using a second epoxy layer. The process was evaluated by packaging a capacitance sensor chip and performing live cell culture experiments with package cleaning and reuse. Results showed good structural reliability in three repeated experiments over five cumulative days, with no adverse effects on the viability of cells.

Original languageEnglish
Title of host publication2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538648810
DOIs
StatePublished - Apr 26 2018
Event2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018 - Florence, Italy
Duration: May 27 2018May 30 2018

Publication series

NameProceedings - IEEE International Symposium on Circuits and Systems
Volume2018-May

Conference

Conference2018 IEEE International Symposium on Circuits and Systems, ISCAS 2018
Country/TerritoryItaly
CityFlorence
Period05/27/1805/30/18

Keywords

  • biosensor chip
  • cell culture
  • lab on a chip
  • packaging
  • planar metallization

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