The transport of intensity equation for optical path length recovery using partially coherent illumination

Jonathan C. Petruccelli; Lei Tian; George Barbastathis

doi:10.1364/OE.21.014430

The transport of intensity equation for optical path length recovery using partially coherent illumination

Jonathan C. Petruccelli
, Lei Tian
, George Barbastathis

Physics

University at Albany

Massachusetts Institute of Technology

Research output: Contribution to journal › Article › peer-review

136 Scopus citations

Abstract

We investigate the measurement of a thin sample's optical thickness using the transport of intensity equation (TIE) and demonstrate a version of the TIE, valid for partially coherent illumination, that allows the measurement of a sample's optical path length by the removal of illumination effects.

Original language	English
Pages (from-to)	14430-14441
Number of pages	12
Journal	Optics Express
Volume	21
Issue number	12
DOIs	https://doi.org/10.1364/OE.21.014430
State	Published - Jun 2013

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abstract = "We investigate the measurement of a thin sample's optical thickness using the transport of intensity equation (TIE) and demonstrate a version of the TIE, valid for partially coherent illumination, that allows the measurement of a sample's optical path length by the removal of illumination effects.",

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AB - We investigate the measurement of a thin sample's optical thickness using the transport of intensity equation (TIE) and demonstrate a version of the TIE, valid for partially coherent illumination, that allows the measurement of a sample's optical path length by the removal of illumination effects.

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The transport of intensity equation for optical path length recovery using partially coherent illumination

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