Abstract
A method to measure the torsional spring constant of a microcantilever was described. The torsional resonance frequency of the cantilever was obtained by applying electrical current to the cantilever in a magnetic field. The induced Lorentz force twists the cantilever laterally without any normal load. It was found that the torsional spring constant is 11.24 N/m, which is 28 times greater than the deflection spring constant.
| Original language | English |
|---|---|
| Pages (from-to) | 1795-1797 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 10 |
| DOIs | |
| State | Published - Mar 8 2004 |
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