Skip to main navigation Skip to search Skip to main content

Ultra-high aspect-ratio pdms micropillars with self-aligned microspheres for air-flow sensing

  • Iowa State University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We developed a new technique that enables routine fabrications of high aspect-ratio PDMS micropillars. The key enabling factor is the adoption of the direct drawing technique incorporated with the in situ heating for simultaneous hardening and solidification of the PDMS micropillars. In addition, our technique allows self-aligned installation of highly reflective microspheres at the tips of the micropillars. Using the transparent PDMS micropillar as a flexible waveguide and the microsphere as a self-aligned reflector, we transformed the microsphere-tipped PDMS micropillars into all optically interrogated air-flow sensors and successfully demonstrated the air-flow sensing capability.

Original languageEnglish
Title of host publication2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
EditorsMark G. Allen, Mehran Mehregany
PublisherTransducer Research Foundation
Pages395-398
Number of pages4
ISBN (Electronic)9781940470016
DOIs
StatePublished - 2014
Event2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 - Hilton Head Island, United States
Duration: Jun 8 2014Jun 12 2014

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
Country/TerritoryUnited States
CityHilton Head Island
Period06/8/1406/12/14

Fingerprint

Dive into the research topics of 'Ultra-high aspect-ratio pdms micropillars with self-aligned microspheres for air-flow sensing'. Together they form a unique fingerprint.

Cite this