@inproceedings{7a1282205de945d48424d882e686e210,
title = "Ultra-high aspect-ratio pdms micropillars with self-aligned microspheres for air-flow sensing",
abstract = "We developed a new technique that enables routine fabrications of high aspect-ratio PDMS micropillars. The key enabling factor is the adoption of the direct drawing technique incorporated with the in situ heating for simultaneous hardening and solidification of the PDMS micropillars. In addition, our technique allows self-aligned installation of highly reflective microspheres at the tips of the micropillars. Using the transparent PDMS micropillar as a flexible waveguide and the microsphere as a self-aligned reflector, we transformed the microsphere-tipped PDMS micropillars into all optically interrogated air-flow sensors and successfully demonstrated the air-flow sensing capability.",
author = "Jungwook Paek and Jaeyoun Kim",
note = "Publisher Copyright: {\textcopyright} 2014TRF.; 2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 ; Conference date: 08-06-2014 Through 12-06-2014",
year = "2014",
doi = "10.31438/trf.hh2014.106",
language = "English",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "395--398",
editor = "Allen, \{Mark G.\} and Mehran Mehregany",
booktitle = "2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014",
}