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Understanding ultra-thin film resist and underlayer performance through physical characterization

  • Craig Higgins
  • , Seth Kruger
  • , Vimal Kamineni
  • , Richard Matyi
  • , Jacque Georger
  • , Robert Brainard

University at Albany

  • SUNY Albany
  • SEMATECH

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

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Material Science