Abstract
Hydrodynamic predictions of fluid velocity and pressure distribution are made for fluid in a confined space bounded by a vibrating microcantilever and a fixed surface. The results are used to quantify damping factors and predict frequency response amplitudes of a microcantilever vibrating near a fixed surface. The theoretical predictions of vibration response compare favorably with experimental data.
| Original language | English |
|---|---|
| Pages (from-to) | 1105-1110 |
| Number of pages | 6 |
| Journal | Ultramicroscopy |
| Volume | 107 |
| Issue number | 10-11 |
| DOIs | |
| State | Published - Oct 2007 |
Keywords
- 018
- 032
- 047
- Confined fluid
- Microcantilever vibration
- Viscosity
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