Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

Matthew van Niekerk; Venkatesh Deenadalayan; Anthony Rizzo; Gerald Leake; Daniel Coleman; Christopher C. Tison; Michael L. Fanto; Keren Bergman; Stefan Preble

Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

Matthew van Niekerk
, Venkatesh Deenadalayan
, Anthony Rizzo
, Gerald Leake
, Daniel Coleman
, Christopher C. Tison
, Michael L. Fanto
, Keren Bergman
, Stefan Preble

NY Creates Research Foundation

NY Creates

Research output: Contribution to journal › Conference article › peer-review

Abstract

We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (P_π = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.

Original language	English
Article number	JTh3B.24
Journal	Optics InfoBase Conference Papers
State	Published - 2022
Event	CLEO: Science and Innovations, S and I 2022 - San Jose, United States Duration: May 15 2022 → May 20 2022

Cite this

@article{8a9bae47d5fc4cccbbd5f0cc668ec8ee,

title = "Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters",

abstract = "We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (Pπ = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.",

author = "\{van Niekerk\}, Matthew and Venkatesh Deenadalayan and Anthony Rizzo and Gerald Leake and Daniel Coleman and Tison, \{Christopher C.\} and Fanto, \{Michael L.\} and Keren Bergman and Stefan Preble",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); CLEO: Science and Innovations, S and I 2022 ; Conference date: 15-05-2022 Through 20-05-2022",

year = "2022",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

}

TY - JOUR

T1 - Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

AU - van Niekerk, Matthew

AU - Deenadalayan, Venkatesh

AU - Rizzo, Anthony

AU - Leake, Gerald

AU - Coleman, Daniel

AU - Tison, Christopher C.

AU - Fanto, Michael L.

AU - Bergman, Keren

AU - Preble, Stefan

PY - 2022

Y1 - 2022

N2 - We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (Pπ = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.

AB - We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (Pπ = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.

UR - https://www.scopus.com/pages/publications/85136780124

M3 - Conference article

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - JTh3B.24

T2 - CLEO: Science and Innovations, S and I 2022

Y2 - 15 May 2022 through 20 May 2022

ER -

Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

Abstract

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