Abstract
Accurately determining the resolution of x-ray microscopes has been a challenge because good test patterns for x-ray microscopy have been hard to make. We report on a sputter-deposited multilayer imaged in cross section as a test pattern with small features and high aspect ratios. One application of high-resolution imaging is magnetic materials. Off-axis bend magnet radiation is known to have a component of circular polarization which can be used for x-ray magnetic circular dichroism. We calculate the integrated circular polarization collected by the illumination optics in the XM-1 full-field x-ray microscope.
| Original language | English |
|---|---|
| Pages (from-to) | 477-481 |
| Number of pages | 5 |
| Journal | Journal De Physique. IV : JP |
| Volume | 104 |
| DOIs | |
| State | Published - Mar 2003 |
| Event | 7th International Conference on X-Ray Microscopy - Grenoble, France Duration: Jul 28 2002 → Aug 2 2002 |
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