X-ray "magnifying" imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC

J. Härtwig; J. Baruchel; H. Kuhn; X. R. Huang; M. Dudley; E. Pernot

doi:10.1016/S0168-583X(02)01695-6

X-ray "magnifying" imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC

J. Härtwig
, J. Baruchel
, H. Kuhn
, X. R. Huang
, M. Dudley
, E. Pernot

Materials Science and Engineering

Stony Brook University

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The small angular size of the source at the ID19 beamline of the European Synchrotron Radiation Facility (ESRF) allows carrying out X-ray diffraction topographic experiments at sample-to-film distances up to several meters without noticeable blurring of image details. The sample-to-film distance can, in this way, constitute an additional experimental parameter. A combination of white beam X-ray topography and image simulation is applied to reveal, map and quantitatively characterise defects in SiC crystals. In particular, micropipe-related screw dislocations in 4H-SiC with extremely large Burgers vectors are studied. Micropipes with about 6 μm diameter show images half a millimetre wide, and evidence of Burgers vectors several hundred nanometres large has been found. The magnifying function of large-imaging-distance synchrotron radiation topography is essential for this investigation.

Original language	English
Pages (from-to)	323-328
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	200
DOIs	https://doi.org/10.1016/S0168-583X(02)01695-6
State	Published - Jan 2003

Keywords

Silicon carbide

Access to Document

10.1016/S0168-583X(02)01695-6

Cite this

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title = "X-ray {"}magnifying{"} imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC",

abstract = "The small angular size of the source at the ID19 beamline of the European Synchrotron Radiation Facility (ESRF) allows carrying out X-ray diffraction topographic experiments at sample-to-film distances up to several meters without noticeable blurring of image details. The sample-to-film distance can, in this way, constitute an additional experimental parameter. A combination of white beam X-ray topography and image simulation is applied to reveal, map and quantitatively characterise defects in SiC crystals. In particular, micropipe-related screw dislocations in 4H-SiC with extremely large Burgers vectors are studied. Micropipes with about 6 μm diameter show images half a millimetre wide, and evidence of Burgers vectors several hundred nanometres large has been found. The magnifying function of large-imaging-distance synchrotron radiation topography is essential for this investigation.",

keywords = "Silicon carbide",

author = "J. H{\"a}rtwig and J. Baruchel and H. Kuhn and Huang, \{X. R.\} and M. Dudley and E. Pernot",

year = "2003",

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doi = "10.1016/S0168-583X(02)01695-6",

language = "English",

volume = "200",

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T1 - X-ray "magnifying" imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC

AU - Härtwig, J.

AU - Baruchel, J.

AU - Kuhn, H.

AU - Huang, X. R.

AU - Dudley, M.

AU - Pernot, E.

PY - 2003/1

Y1 - 2003/1

N2 - The small angular size of the source at the ID19 beamline of the European Synchrotron Radiation Facility (ESRF) allows carrying out X-ray diffraction topographic experiments at sample-to-film distances up to several meters without noticeable blurring of image details. The sample-to-film distance can, in this way, constitute an additional experimental parameter. A combination of white beam X-ray topography and image simulation is applied to reveal, map and quantitatively characterise defects in SiC crystals. In particular, micropipe-related screw dislocations in 4H-SiC with extremely large Burgers vectors are studied. Micropipes with about 6 μm diameter show images half a millimetre wide, and evidence of Burgers vectors several hundred nanometres large has been found. The magnifying function of large-imaging-distance synchrotron radiation topography is essential for this investigation.

AB - The small angular size of the source at the ID19 beamline of the European Synchrotron Radiation Facility (ESRF) allows carrying out X-ray diffraction topographic experiments at sample-to-film distances up to several meters without noticeable blurring of image details. The sample-to-film distance can, in this way, constitute an additional experimental parameter. A combination of white beam X-ray topography and image simulation is applied to reveal, map and quantitatively characterise defects in SiC crystals. In particular, micropipe-related screw dislocations in 4H-SiC with extremely large Burgers vectors are studied. Micropipes with about 6 μm diameter show images half a millimetre wide, and evidence of Burgers vectors several hundred nanometres large has been found. The magnifying function of large-imaging-distance synchrotron radiation topography is essential for this investigation.

KW - Silicon carbide

UR - https://www.scopus.com/pages/publications/0037241383

U2 - 10.1016/S0168-583X(02)01695-6

DO - 10.1016/S0168-583X(02)01695-6

M3 - Article

SN - 0168-583X

VL - 200

SP - 323

EP - 328

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

X-ray "magnifying" imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC

Abstract

Keywords

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