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X-ray studies of interfacial roughness in ZnSe GaAs heterostructures

  • A. Krol
  • , C. J. Sher
  • , S. C. Woronick
  • , Y. H. Kao
  • , R. J. Dalby
  • , D. A. Cammack
  • , R. N. Bhargava

Research output: Contribution to journalArticlepeer-review

Abstract

The angular dependence of x-ray reflectivity and fluorescence yield of ZnSe GaAs heterostructures was measured. By an analysis based on scalar scattering, the root-mean-square values of two roughness parameters pertaining to the top surface and the buried interface have been determined.

Original languageEnglish
Pages (from-to)435-437
Number of pages3
JournalSuperlattices and Microstructures
Volume4
Issue number4-5
DOIs
StatePublished - 1988

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